By oxidizing ruthenium (for example with an oxygen plasma) into the volatile oxides, ruthenium can be easily patterned.

Then the oxygen plasma may be my last and cleanest step.

For example, oxygen plasma emits a light blue color.

In conjunction with semiconductor manufacturing, micromachining and display production the removal of organic residues by oxygen plasmas is sometimes correctly described as a dry etch process.

Rhodium oxide thin films can be produced by exposing Rh layer to oxygen plasma.

Typically, monatomic (single atom) oxygen plasma is created by exposing oxygen gas at a low pressure (O) to high power radio waves, which ionise it.

In most cases, the surface in question is surface of a polymer material and weakly ionised oxygen plasma is used.

The wafers can be cleaned using HO + HSO or oxygen plasma.

PDMS is treated with oxygen plasma and placed in contact with the functionalized thermoplastic surface.

There are also processes involving oxygen plasma and corona discharge.